ME 4801 - Introduction to Micro-Electromechanical Systems (3)

An introduction of Micro-electromechanical systems (MEMS), which is the integration of mechanical elements, sensors, actuators, and electronics with a dimension of micrometers. It has been found increased application in a variety of industrial areas including; semi-conductors, automation, and biomedical fields. Exploration of various aspects of MEMS, including materials, design, fabrication and applications of MEMS. Top-level survey of MEMS encompassing broad coverage of this multidisciplinary field.

Prerequisite(s): ME major, C- or better in ME 3150 or ME 315, C- or better in ME 3121 or ME 312, C- or better in ME 3451 or ME 435, and C - or better in ME 3451L or ME 435L.
Component(s): Lecture
Grading Basis: Graded Only
Repeat for Credit: May be taken only once