ME 5801 - Micro-Electromechanical System (3)

An introduction of Micro-electromechanical systems (MEMS), which is the integration of mechanical elements, sensors, actuators, and electronics with a dimension of micrometers. It has been found increased application in a variety of industrial areas including; semi-conductors, automation, and biomedical fields. Exploration of various aspects of MEMS, including materials, design, fabrication and applications of MEMS. Top-level survey of MEMS encompassing broad coverage of this multidisciplinary field.

Component(s): Lecture
Grading Basis: Graded Only
Repeat for Credit: May be taken only once