May 18, 2024  
2017-2018 University Catalog 
    
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2017-2018 University Catalog [ARCHIVED CATALOG]

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ECE 530 - Microelectomechanical Devices and Systems (4)

MEMS processes and structures. Applications of basic physical principles to microsystem design. Modeling methods for electromechanical structures. CAD for MEMS. Packaging.

Prerequisite(s): Graduate standing or consent of the instructor.
Component(s): 4 lectures/problem-solving.
Grading: Graded
When Offered: Upon demand and resource availability


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